199 Case/Cases per Month 3 target Plasma magnetron sputtering coater
Packaging & Delivery
PLY WOODEN BOX
1 - 1
To be negotiated
CYKY New design 3 target Plasma magnetron sputtering coating machine system
Application of plasma sputtering coater
CY-16-3H is a CE certified compact Three Rotary Target Plasma Sputtering Coater with a touch screen digital controller, and a substrate heater capable of heating up to 400°C. It can coat 1- 3 types of metallic materials to samples with diameters up to 50 mm. Three sputtering targets, Gold, Aluminum, Copper, vacuum pump, stainless steel bellows with KF25 adapters & clamps and a vapor trap are included for immediate use.
Features of plasma sputtering coater
1.Hinged type cover on top with air spring sport makes target exchange easy
2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in
3.touch screen control panel with +/- 1 degree accuracy
4.Made in Germany high speed turbo vacuum pump system
1.220VAC 50/60Hz, single phase
2.700W (including pump)
1.Two sputtering power sources are integrated into one control box 2. DC source: 500W for coating metallic materials 3.RF source: 600W with automatching for coating non-metallic materials ( Center) 4.Compact 300 RF source is available at extra cost
Heating sample stage
1.One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button. 2.The substrate heater is built in the stage with a max. heating temperature of 500°C 3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets 4.One stainless steel and one Al2O3 ceramic targets are included for demo testing 5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally controlled recirculating water chiller is included for cooling both magnetron sputtering heads 6.Customized coater: Two DC head without, RF sputtering, RF head without DC sputering,3 RF head are available upon request
1.Vacuum Chamber: 150mm I.D *150mm height, made of stainless steel 2.Observation Window: 100 mm diameter
1.Sample holder size: 47mm 2. Au,Ag and Cu( 2.5mm Thick) 3.Accuracy +/- 1.0 °C Note: Al, Mg, Zn light metal can not be coated by using this coater
Gas Flow Control
1.Flow rate: 200 ml/min max. 2. One needle valve installed to allow Ar gas inlet to achieve better plasma coating
Vacuum Pump Station
High speed turbo vacuum pump system is directly installed on the vacuum chamber for max. vacuum level Heavy duty dual stage mechanical pump is connected to turbo pump for faster pump speed Mobile pump station is included and the compact sputtering coater can be put on top of station Max. vacuum level: 10^-6 torr with chamber baking
L440mm× W330mm× H1300mm
The system requires an Ar gas tank with a pressure regulator that are not included.
One years limited warranty with lifetime support
Zhengzhou CY Scientific Instrument Co., Ltd is a professional high- tech enterprise,it has 20 years history of R&D,manufacture and sales in advanced materials.Many products are awarded as high-tech products and obtain patents.
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Packaging & Shipping
Packaging: -The glass parts will be wrapped with foam,then put into the carton; the mainbody portion will be packed in wooden cases; -Both neutral and customized packaging can be available. Shipping: -We can ship the goods to you by International Express such as DHL,UPS,TNT,EMS and so on, you can also choose the appropriate one based on your timeline and budget. Besides,you can choose to use your own shipping agent.
Door to door, very convenient, don't need to clearance or pick-up
Airport to airport, you need to do the customs clearance and pick up the
goods at your local airport, which you can have a local shipping agent to do for you.
Port to port and you need to do the customs clearance and pick-up the goods
at your local port, which you can have a local shipping agent to do for you.