CYKY New design 3 target Plasma magnetron sputtering coating machine system

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$15,380.00 - $21,350.00 / Case | 1 Case/Cases (Min. Order)
Lead Time:
Quantity(Cases) 1 - 1 >1
Est. Time(days) 15 Negotiable
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Quick Details
Laboratory Heating Equipments
Brand Name:
Model Number:
Place of Origin:
Henan, China
3 target Plasma magnetron sputtering coater
Powder Coating Boother Coating Booth
metallic materials
Vacuum Coating
LCD programmable control
Vacuum chamber:
I.D 150*150mm
Observation window:
Sample hoder size:
47mm Dia
Supply Ability
Supply Ability:
199 Case/Cases per Month 3 target Plasma magnetron sputtering coater
Packaging & Delivery
Packaging Details
Lead Time :
Quantity(Cases) 1 - 1 >1
Est. Time(days) 15 To be negotiated

CYKY New design 3 target Plasma magnetron sputtering coating machine system

Product Description


Application of plasma sputtering coater

CY-16-3H is a CE certified compact Three Rotary Target Plasma Sputtering Coater with a touch screen digital controller, and a substrate heater capable of heating up to 400°C. It can coat 1- 3 types of metallic materials to samples with diameters up to 50 mm. Three sputtering targets, Gold, Aluminum, Copper, vacuum pump, stainless steel bellows with KF25 adapters & clamps and a vapor trap are included for immediate use.

Features of plasma sputtering coater

1.Hinged type cover on top with air spring sport makes target exchange easy

2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in

3.touch screen control panel with +/- 1 degree accuracy

4.Made in Germany high speed turbo vacuum pump system 

Technical Parameters:
Input Power 
1.220VAC 50/60Hz, single phase
2.700W (including pump)
Source Power 
1.Two sputtering power sources are integrated into one control box
2. DC source: 500W for coating metallic materials
3.RF source: 600W with automatching for coating non-metallic materials ( Center)
4.Compact 300 RF source is available at extra cost

Heating sample stage 
1.One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button.
2.The substrate heater is built in the stage with a max. heating temperature of 500°C
3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets
4.One stainless steel and one Al2O3 ceramic targets are included for demo testing
5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally
controlled recirculating water chiller is included for cooling both magnetron sputtering
6.Customized coater: Two DC head without, RF sputtering, RF head without
DC sputering,3 RF head are available upon request
Vacuum Chamber
1.Vacuum Chamber: 150mm I.D *150mm height, made of stainless steel
2.Observation Window: 100 mm diameter
Sample Holder
1.Sample holder size: 47mm
2. Au,Ag and Cu( 2.5mm Thick)
3.Accuracy +/- 1.0 °C
Note: Al, Mg, Zn light metal can not be coated by using this coater

Gas Flow Control
1.Flow rate: 200 ml/min max.
2. One needle valve installed to allow Ar gas inlet to achieve better plasma coating
Vacuum Pump Station 
High speed turbo vacuum pump system is directly installed on the vacuum chamber
for max. vacuum level
Heavy duty dual stage mechanical pump is connected to turbo pump for faster
pump speed
Mobile pump station is included and the compact sputtering coater can be put on
top of station
Max. vacuum level: 10^-6 torr with chamber baking 
Overall Dimensions
 L440mm× W330mm× H1300mm
Application Note 
The system requires an Ar gas tank with a pressure regulator that are not included.
Net Weight 
50 kg
One years limited warranty with lifetime support


Company Information

Company Description:

Zhengzhou CY Scientific Instrument Co., Ltd is a professional high- tech enterprise,it has 20 years history of R&D,manufacture and sales in advanced materials.Many products are awarded as high-tech products and obtain patents.


Mainly products:

Muffle furnace

Atmosphere furnace

Tube furnace

Dental sintering furnace

Vacuum furnace

Crucible furnace

Bottom loading furnace

Car bottom furnace






Packaging & Shipping



-The glass parts will be wrapped with foam,then put into the carton; the mainbody portion will be packed in wooden cases;
-Both neutral and customized packaging can be available.
-We can ship the goods to you by International Express such as DHL,UPS,TNT,EMS and so on, you can also choose the appropriate one based on your timeline and budget. Besides,you can choose to use your own shipping agent.


Shipping methodNote
ExpressDoor to door, very convenient, don't need to clearance or pick-up
By air

Airport to airport, you need to do the customs clearance and pick up  the

goods at your local airport, which you can have a local shipping agent to do for you.

By seaPort to port and you need to do the customs clearance and pick-up the goods

at your local port, which you can have a local shipping agent to do for you.



Contact Information




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