PVD magnetron sputter deposition machine for preparing single-layer or multi-layer ferroelectric thin films

FOB Reference Price:Get Latest Price
$18,000.00 - $25,000.00 / Set | 1.0 Set/Sets (Min. Order)
Model Number:
Lead Time:
Quantity(Sets) 1 - 1 >1
Est. Time(days) 30 Negotiable
Report Suspicious Activity
Quick Details
Machine Type:
lab coating machine
Video outgoing-inspection:
Machinery Test Report:
Not Available
Marketing Type:
New Product 2020
Warranty of core components:
Core Components:
Motor, Pressure vessel, Pump
Place of Origin:
Henan, China
Brand Name:
1400mm x 750mm x 1300mm
After-sales Service Provided:
Field installation, commissioning and training, Field maintenance and repair service, Video technical support, Online support
Key Selling Points:
Easy to Operate
After Warranty Service:
Video technical support, Online support
Applicable Industries:
Manufacturing Plant, laboratory
Local Service Location:
United States
Showroom Location:
United States
DC magnetron sputtering coater
Heating temperature:
Max 500℃
Temperature control accuracy:
Sample stage size:
140mm dia.
Chamber material:
Stainless steel
Sputterinmg head:
dia. 2 inches
Watch window:
100mm dia
Cooling mode:
Water cooling
Backing pump:
rotary vane pump
Max output power:
DC 500W
Coating Production Line
Vacuum Coating
Supply Ability
Supply Ability:
100 Piece/Pieces per Month
Packaging & Delivery
Packaging Details
Plastic paper inside,polyfoam fileld,wooden box outside
Picture Example:
Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 30 To be negotiated

PVD magnetron sputter deposition machine for preparing single-layer or multi-layer ferroelectric thin films

Product Description

The dual-target magnetron sputtering coating instrument is a small laboratory coating instrument with two targets developed by our company, which can be used to prepare single-layer or multi-layer ferroelectric thin films, conductive thin films, alloy thin films, semiconductor thin films, ceramic thin films , Dielectric film, optical film, etc.
Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy and high speed. The coating rate is high and the sample temperature rise is low. It is a typical high-speed low-temperature sputtering. The magnetron target is equipped with a water-cooled interlayer. The water chiller can effectively take away the heat, avoid heat accumulation on the target surface, and make the magnetron coating work stably for a long time.
Compared with similar equipment, this dual target magnetron sputtering coating instrument is not only widely used, but also small in size and easy to operate, it is an ideal equipment for preparing thin films in the laboratory.

Specifications of Magnetron Sputtering Coater:

Supply voltage


Total power


Ultimate vacuum


Loading table parameters



Heating temperature

highest 500℃

Temperature control accuracy


Rotating speed

1-20rpm Adjustable

Magnetron sputtering head parameters


Two 2” Magnetron sputtering head

cooling method

Water cooling, the required flow rate is 10L / min

Water chiller specifications

Circulating water cooler with 16L / min flow rate

Vacuum chamber

Chamber size

φ300mm x 300mm H

Chamber material

stainless steel

Observation window


Opening method

Top opening type, easy to change target

Gas flow controller

4 channels through N2, Ar, O2, air;

Range is 0-500sccm

Vacuum pump

Equipped with a molecular pump system, pumping speed 600L / S

Thickness meter

One quartz vibrating film thickness gauge with a resolution of 0.10 Å

Sputtering power

One DC power supply, 500W, suitable for preparing metal film

One RF power supply, 300W, suitable for non-metallic coating

Operation method

Panel button operation

Overall size

1400mm x 750mm x 1300mm

Total Weight


Pictures of magnetron sputter coater:

Other magnetron sputtering coater:

online service

Company Introduction

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.


We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.




Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.


Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.


Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.


Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.


Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.


Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.


More questions, please contact customer service