Vacuum heated spin coater for resist coating on semiconductor wafers

FOB Reference Price:Get Latest Price
$4,150.00 - $8,900.00 / Set | 1.0 Set/Sets (Min. Order)
Lead Time:
Quantity(Sets) 1 - 1 >1
Est. Time(days) 20 Negotiable
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Quick Details
Coating Production Line
Machine Type:
lab coating machine
Vacuum Coating
Place of Origin:
Henan, China
Brand Name:
220V/380V, 220V/380V
15kg, 15kg
After-sales Service Provided:
Field maintenance and repair service, Video technical support, Online support
Key Selling Points:
Easy to Operate
After Warranty Service:
Online support
Applicable Industries:
Machinery Repair Shops, Manufacturing Plant, laboratory
Local Service Location:
United States
Showroom Location:
United States
Spin Coater
Rotate speed:
0~ 10000rpm
Speed resolution:
Substrate size:
Diameter ≤ 8 inches
Chamber material:
Heating temperature:
Overall size:
Supply Ability
Supply Ability:
120 Set/Sets per Month
Packaging & Delivery
Packaging Details
Plywood Box/as customer request
Zhengzhou;Qingdao;as customer request
Picture Example:
Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 20 To be negotiated

Vacuum heated spin coater for resist coating on semiconductor wafers

Product Description
vacuum heating type spin coater adds the function of inner chamber vacuum pumping based on the heating type spin coater, to ensure that the substrate is evenly coated under heating and vacuum negative pressure conditions.vacuum heating type spin coater’s maximum vacuum negative pressure is up to -0.06Mpa. More negative pressure requires special custom design.

The vacuum heating type spin coater mainly uses the centrifugal coating principle to coat a liquid or colloidal material on the substrate such as silicon wafer, crystal, quartz, ceramic and so on to form a thin film, and the film has a wide application in the field of material research. The working chamber of the heating type spin coater is made of polytetrafluoroethylene (plastic king) material, which is a polymer compound formed by polymerization of tetrafluoroethylene, which has excellent chemical stability and strong corrosion resistance. It is widely used in a variety of applications requiring acid and alkali resistance and organic solvents.
Vacuum heating type spin coater product features:
1. The surface of the coating can be heated at a constant temperature. The heating range is from room temperature to 120 °C, and the temperature control precision is 0.1 °C.
2. It can be used to uniformly coat organic matter for film preparation.
3. You can first be spin coating, and then bak it.
4. Rotating coating process parameters for a variety of different substrates can be stored. Each coating process can be set up with multiple different rotational speeds.
5. The working chamber is made of polypropylene (PP) material.

Specification of the spin coater:



rotating speed


accelerated speed


Speed resolution


Single step time


Voltage input

AC120V  60Hz


Pictures of spin coater:

online service

Company Introduction

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.


We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.




Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.


Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.


Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.


Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.


Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.


Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.


More questions, please contact customer service