1200C high temperature three zones tube furnace for CVD deposition / 3 zone tube furnace

FOB Reference Price:Get Latest Price
$1,100.00 - $12,968.00 / Set | 1 Set/Sets (Min. Order)
Lead Time:
Quantity(Sets) 1 - 4 >4
Est. Time(days) 45 Negotiable
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Overview
Quick Details
Classification:
Laboratory Heating Equipments
Brand Name:
CYKY
Model Number:
CVD -O1200-60IIIC-R
Place of Origin:
Henan, China
MFC range:
0 - 500 SCCM
Gas channel:
customized
ultimate vacuum degree:
10(-3) pa
temperature controller:
programmable
heating element:
MoSi2 rods
thermocouple:
B type
temperature accuracy:
1 C
Max. temperature:
1600C
Working temperature:
1500C
Heating zone No.:
customized
Supply Ability
Supply Ability:
500 Set/Sets per Year CVD system
Packaging & Delivery
Packaging Details
plywood case
Port
Any port as your requirement
Lead Time :
Quantity(Sets) 1 - 4 >4
Est. Time(days) 45 To be negotiated

1200C high temperature three zones tube furnace for CVD deposition / 3 zone tube furnace

Product Description

 

 

The perameter specification of the CVD system with three zone tube furnace / CVD furnace System

 

1600X-III series tube furnace

Casing

Double layer steel casing with air cooling.Built in thermostat to

 control Cooling 

running automatically when case > 55C.

Processing Tube

Material: 99.8 high purity alumina

Thermal Block Placement

2 pieces 

Power

7KW

Rated Voltage

AC 208-240V Single phase, 50/60Hz

Heating Element

MoSi2 Heating element

Working Temp.

Max. Heating Temp.: 1200CContinuous Working Temp.: 1500C

Heat-up Rate 

Heat-up rate: 1~15C/min programmable

Heating Zone Length

Total heating zone:600mm (220mm + 200mm + 200mm)

This is customized.

Temp. Controller

Three precision temperature controllers to control three zones separately.

PID automatic control with 30 steps programmable segments.

Temperature accuracy: 1C

Thermocouple:B type built inside the furnace

Vacuum Seal

One pair of stainless steel vacuum flange with:- one mechanical 

pressure gauge- two needle valves - one KF-40 connector for the high 

vacuum station.

Rated Voltage

AC 208-240V Single Phase, 50/60Hz

Dimension

1100(L) x 450(W) x 670(H), mm

High Vacuum Station

Structure

Mobile cart size: 600 (L) x 600 (W) x 700(H), mm

Max. Loading: 600 Lbs on top

Molecular pump control Panel : LCD digital display

Working Range

From 1000 mbar to <1E-7 mbar

Ultimate Pressure

<1E-2mbar (without any leaking )

Voltage & Power

110VAC or 220VAC, 110W

Mass Flow Gas Control

Structure

3 channel MFC Made of 316 stainless steel with gas flow range as below:

Controller : 0~500SCCM

3 Channel gas go through a Gas mixing tank: Dia 80X120mm 

Dimension: 600(L) x 600(W) x 700(H), mm

Power

18W

Rated Voltage

AC 208-240V, Single phase, 50/60Hz

 

 Detailed photos of the CVD system with three zones tube furnace

 

 

The gas control with Mass Flow Controller:

the gas controll system with Flowmeter controller

The 1200C Split type three zones tube furnace:

 

 

Company Information

Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches.
Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.

Packaging & Shipping

 

wooden case

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