1200C high temperature three zones tube furnace for CVD deposition / 3 zone tube furnace
The perameter specification of the CVD system with three zone tube furnace / CVD furnace System
1600X-III series tube furnace
Double layer steel casing with air cooling.Built in thermostat to
running automatically when case > 55C.
Material: 99.8 high purity alumina
Thermal Block Placement
AC 208-240V Single phase, 50/60Hz
MoSi2 Heating element
Max. Heating Temp.: 1200CContinuous Working Temp.: 1500C
Heat-up rate: 1~15C/min programmable
Heating Zone Length
Total heating zone:600mm (220mm + 200mm + 200mm)
This is customized.
Three precision temperature controllers to control three zones separately.
PID automatic control with 30 steps programmable segments.
Temperature accuracy: 1C
Thermocouple:B type built inside the furnace
One pair of stainless steel vacuum flange with:- one mechanical
pressure gauge- two needle valves - one KF-40 connector for the high
AC 208-240V Single Phase, 50/60Hz
1100(L) x 450(W) x 670(H), mm
High Vacuum Station
Mobile cart size: 600 (L) x 600 (W) x 700(H), mm
Max. Loading: 600 Lbs on top
Molecular pump control Panel : LCD digital display
From 1000 mbar to <1E-7 mbar
<1E-2mbar (without any leaking )
Voltage & Power
110VAC or 220VAC, 110W
Mass Flow Gas Control
3 channel MFC Made of 316 stainless steel with gas flow range as below:
Controller : 0~500SCCM
3 Channel gas go through a Gas mixing tank: Dia 80X120mm
Dimension: 600(L) x 600(W) x 700(H), mm
AC 208-240V, Single phase, 50/60Hz
Detailed photos of the CVD system with three zones tube furnace
The gas control with Mass Flow Controller:
the gas controll system with Flowmeter controller
The 1200C Split type three zones tube furnace:
Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches. Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.