DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater system

FOB Reference Price:Get Latest Price
$19,000.00 - $45,662.00 / Set | 1.0 Set/Sets (Min. Order)
Model Number:
Lead Time:
Quantity(Sets) 1 - 2 >2
Est. Time(days) 65 Negotiable
Customized logo (Min. Order: 5 Sets)
Customized packaging (Min. Order: 5 Sets)


Graphic customization (Min. Order: 5 Sets) Less
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Quick Details
magnetron sputtering system
magnetron sputtering system
Machine Type:
lab equipment
Vacuum Coating
Place of Origin:
Henan, China
Brand Name:
220VAC 50/60Hz
48" * 28" * 37"
Key Selling Points:
Easy to Operate
After Warranty Service:
Video technical support, Online support
Applicable Industries:
Lab Material
Local Service Location:
Egypt, Canada, Turkey, United Kingdom, United States
Showroom Location:
Egypt, Canada, United States
Product Name:
Magnetron Plasma Sputtering Coater system
220VAC 50/60Hz, single phase
source power:
Two sputtering power
vacuum chamber size:
300 mm Dia x 300 mm height
Sample holder size:
140mm dia. for. 4" wafer max
Sample holder rotation speed:
1 - 20 rpm for uniform coating adjustable
Flow rate.:
200 ml/min max
Ultimate vacuum:
10-6 torr
Sample Stage Speed:
1~20rpm adjustable
1 year
Supply Ability
Supply Ability:
200 Set/Sets per Year
Packaging & Delivery
Packaging Details
wooden case
China port
Lead Time :
Quantity(Sets) 1 - 2 >2
Est. Time(days) 65 To be negotiated

DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater system 

Product Description


Double target magnetron sputtering coater is a small laboratory coater with two targets developed by our company. It can be used to prepare single or multi-layer ferroelectric film, conductive film, alloy film, semiconductor film, ceramic film, dielectric film, optical film, etc.
Compared with ordinary plasma sputtering, magnetron sputtering has the advantages of high energy, high speed, high coating rate and low sample temperature rise, which is a typical high-speed low-temperature sputtering. The magnetron target is equipped with a water-cooled inter layer, the water cooler can effectively take away heat, avoid heat gathering on the target surface, and make the magnetron coating work stably for a long time.
In addition, the device is also equipped with bias power supply, which can add bias electric field between the target and the sample platform, enhance the energy of ions, improve the film quality and adhesion of the film. The whole machine adopts touch screen control, one key coating procedure, simple operation, and is an ideal equipment for preparing thin film in the laboratory.


Double target magnetron sputtering coater parameters:







Ultimate vacuum

10-6 torr

Sample stage


Heating temperature:MAX.500℃


Speed:1~20rpm adjustable

Magnetron sputtering head

Number: two ,2-inch

Cooling mode: Water cooling,10L / min flow rate

Vacuum Chamber

Size:φ300mm × 300mm H

Material:stainless steel

Observation window:φ100mm

Opening mode:Open top, easy to replace the target

Gas flow controller

2 ways: Ar, N2;Range 0-100sccm

Vacuum pump

Molecular pump system, pumping speed: 600L/S

Film thickness gauge

Quartz vibrating film thickness gauge , resolution: 0.10 μ M

Sputtering power supply

One DC power supply, 1000W, suitable for preparing metal film

One RF power supply, 500W, suitable for non-metallic coating

Operation mode

Panel button operation


1400mm × 750mm × 1300mm


300 KG



Display of the  DC/RF Dual-Head High Vacuum 2" Magnetron Plasma Sputtering Coater system




Company Information

Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches.
Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.


Packaging & Shipping


wooden case




1. Are you a manufacturer or trade company ?

Yes,you can assured that we are a professional manufacturer with full experience, and

doing business in domestic and oversea for many years.

2. We are not professional for operation and installation of your machine?

While this is not difficult to solve,our machine is easy to operate,no need to

professional training,and the instruction manual and vedio we make can teach you step by step.

What’s more,we have professional engineers , if needed we can send them to your side to solve the problem.

Also we supply online service at any time.

3. How about packaging ? if machine damaged,what should I do ?

Usually machine is packed with wooden case and standard export carton,

plywood carton or as your requirement. Before delivery we will also send you the packing photos of the goods to confirm with you. After agreed, we will deliver it.

Damage haven’t happened before, if happen,we will arrange replacement.

4. We haven’t do business before,how can I trust your company and machine ?

We have been GOLD supplier with no complaints on Alibaba.and our machine have exported to many countries all over the world.

Also you are welcome to have a visit of us at any time. We will pick you up from the airport and arrange everything well for you.

Our Services