CYKY Dual-target magnetron sputtering coater (300W RF power supply+500W DC power supply)

FOB Reference Price:Get Latest Price
$18,000.00 - $32,000.00 / Unit | 1 Unit/Units (Min. Order)
Model Number:
CY-MSP300S-RFDC
Lead Time:
Quantity(Units) 1 - 1 >1
Est. Time(days) 30 Negotiable
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Overview
Quick Details
Condition:
New
Type:
Powder Coating Booth
Substrate:
metallic materials
Machine Type:
lab equipment
Coating:
Vacuum Coating
Place of Origin:
Henan, China
Brand Name:
CYKY
Voltage:
220V
Power(W):
2kw
Dimension(L*W*H):
1300*660*1200mm
Weight:
160KG
Certification:
CE
Key Selling Points:
Accurate temperature control
After Warranty Service:
Video technical support
Applicable Industries:
Manufacturing Plant
Local Service Location:
United States
Showroom Location:
United States
After-sales Service Provided:
No overseas service provided
Name:
Dual-head metal coating machine
Model No.:
CY-MSP300S-RFDC
Control:
LCD programmable control
Vacuum chamber:
O.D 300mm*300mm
Observation window:
100mm
Sample hoder size:
140mm Dia for 4" wafer
Temperature accuracy:
+/-1 C
Temperature range:
RT-500C
Outer size:
1300*660*1200mm
Warranty:
12 month
Supply Ability
Supply Ability:
20 Set/Sets per Month magnetron sputtering coater
Packaging & Delivery
Packaging Details
PLY WOODEN BOX
Port
zhenghzou
Lead Time :
Quantity(Units) 1 - 1 >1
Est. Time(days) 30 To be negotiated
Video Description

CYKY Dual-target magnetron sputtering coater (300W RF power supply+500W DC power supply)

Product Description

 

Dual-head Magnetron Sputtering Machine is a magnetron sputtering system featuring dual target sources:

1) DC source for coating metallic material on one head and

2) RF source for coating non-metallic material on the other head. It is equipped with a film thickness tracker to enable the user to easily monitor the coating progress and also record the data. 

 

Features of Vacuum Sputtering Machine

 

1.Hinged type cover on top with air spring sport makes target exchange easy

 

2.Two precision digital MFC (mass flow controller) are installed to allow two types of gases to be filled in

 

3.touch screen control panel

 

4.Made in Germany high speed turbo vacuum pump system 

 

Technical of Vacuum Sputtering Machine

 

Input Power

1.220VAC 50/60Hz, single phase

2.2000W  (including pump)

Source Power1.Two sputtering power sources are integrated into one control box
2. DC source: 500W for coating metallic materials
3.RF source: 600W with automatching for coating non-metallic materials ( Center)
4.Compact 300 RF source is available at extra cost
Magnetron Sputtering  Head

1.Two 2" Magnetron Sputtering  Heads with water cooling jackets are included  

One is connected to RF power supply for no-conductive materials  

Another is connected to DC sputtering power source for coating metallic materials

2.Target size requirement: 2" diameter
3.Thickness Range: 0.1 - 5 mm for both metallic and non-conductive targets
4.One stainless steel and one Al2O3 ceramic targets are included for demo testing

5.Head Water Cooling: 10ml/min water flow required, and one 16ml/min digitally 

controlled recirculating water chiller is included for cooling both magnetron sputtering 

heads

6.Customized coater: Two DC head without, RF sputtering,  RF head without 

DC sputering,3 RF head are available upon request

Vacuum Chamber1.Vacuum Chamber: 300 mm Dia x 300 mm height, made of stainless steel
2.Observation Window:  100 mm diameter
Sample Holder1.Sample holder size: 140mm dia. for. 4" wafer max
2.Sample holder rotation speed is adjustable: 1 - 20 rpm for uniform coating
3.The holder temperature is adjustable from RT to 500°C Max with accuracy +/- 1.0 °C
Gas Flow Control1.Flow rate:  200 ml/min max.
2.Flow rate is adjustable on the 6" touch screen control panel
Vacuum Pump Station

High speed turbo vacuum pump system is directly installed on the vacuum chamber

 for max. vacuum level 

Heavy duty dual stage mechanical pump is connected to turbo pump for faster 

pump speed

Mobile pump station is included and the compact sputtering coater can be put on

top of station

Max. vacuum level: 10^-6 torr with chamber baking     
Thickness Monitor

One Precision quartz thickness sensor is built into the chamber to monitor coating 

thickness with accuracy 0.10 Å  

LED Display Unit outside chamber can:
Input material to be coated according to data base included
Display total thickness coated and coating speed
 5 pcs quartz sensors (consumable) are included 
Water cooling is required
Overall DimensionsL1300mm× W660mm× H1200mm
Application Note

In order to remove oxygen from the chamber,  suggest you use 5% Hytrogen + 95 % 

Nitrogen to clan chamber 2-3 times, which can reduce oxygen to below 10 ppm

Please use > 5N purity Argon gas for plasma sputtering.  Even though 5N purity Ar, usually contain 10- 100 ppm oxygen and H2O
Net Weight160 kg
WarrantyOne years limited warranty with lifetime support

 

Pictures of Vacuum Sputtering Machine

 

Packing list

 

 Item name Quantity
 DC power control system 1 set
 RF power control system 1 set
 Film thickness monitoring system 1 set
 Vacuum pump 1 set
 Water chiller 1 set
 Cooling pipe 1 set
 Target Stainless steel 1pc; Ceramic 1 pc

 

Company Information

Company Description:

Zhengzhou CY Scientific Instrument Co., Ltd is a professional high- tech enterprise,it has 20 years history of R&D,manufacture and sales in advanced materials.Many products are awarded as high-tech products and obtain patents.

 

Mainly products:

Muffle furnace

Atmosphere furnace

Tube furnace

Dental sintering furnace

Vacuum furnace

Crucible furnace

Bottom loading furnace

Car bottom furnace

Etc.

  

 

Our Services

 Payment

 

T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC

Warranty

 

Main product is 15 month, except wearing parts. 

 

Related Products

 

contact information

Pamela
Manager-Sales
ZHENGZHOU CY SCIENTIFIC INSTRUMENT CO.,LTD
Add:Room 820,# 9bld, 863 software park,Hi-techzone,Zhengzhou,China
Tel: 86-13253655998
Skype:Pamela945 CYKY
Wechat:13253655998
Fax: 86-0371-86036875