roll to roll thin film deposition machine two dimensional film growth system

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Laboratory Heating Equipments
Brand Name:
Model Number:
Place of Origin:
Henan, China
max. temperature:
output power:
5 -300W adjustable
<50 dB
control panel:
touch screen panel
temperature accuracy:
two dimensional film growth system
one year
Supply Ability
Supply Ability:
110 Set/Sets per Month two dimensional film growth system
Packaging & Delivery
Packaging Details
Plastic paper inside,polyfoam filled,wooden box outside
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Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 35 To be negotiated

Roll to Roll PE-CVD System for Continuous Graphene or Two Dimensional Film Growth - OTF-1200X-II-PE-RR

OTF-1200X-II-PE-RR is a lab scale Roll to Roll PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 80mm O.D two heating zone a split tube furnace at 1200oC Max., 3 channel MFC gas delivery station, and high-quality mechanical vacuum pump, and two vacuum chambers with substrate reeling in and out, as well as touch screen control panel. The R2R system is designed for exploring flexibility to grow graphene or other two dimension film continuously for industry.


Two Heating Zone Split Tube Furnace

Two heating zone with 440 mm length single heating zone and 250 mm length constant temperate zone

1200oC Max. working temperature for < 60 minutes

1100oC Max for continuous heating

30 segments programmable precision digital temperature controller

High purity quartz tube: 80mm OD x 72mm ID x 1400 mm Length 2.83"ID x 55'' Length

Input power: 208 – 240V AC input, single phase at max. 3KW

Three heating zone furnace is available as optional

Plasma RF Power Supply

Output Power:          5 -300W adjustable with ± 1% stability

RF frequency:          13.56 MHz ±0.005% stability

Matching:                Automatic

RF Output Port:       50 Ω, N-type, female

Noise:                    <50 dB

Cooling:                  Air cooling.

Power:                    208-240VAC, 50/60Hz

Three Channel Gas Delivery Station

Working Temp.: 5~45 ºC

Max. Pressure: 3x10Pa

Accuracy: ±1.5% FS

Liner: ±(0.5-1.5)%F.S.

Duplicate accuracy: ±0.2%F.S.

Controlling Range:

Controller 1: 0~100 SCCM   ( Ar gas calibration)

Controller 2: 1~199 SCCM  ( H2 gas calibration )

Controller 3: 1~499 SCCM   ( Methane calibration )

Vacuum Pump and valve


Heavy Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.

 KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve

Digital vacuum pressure gauge and display are installed with the furnace

Oiless pump is available and PID pressure controlled vacuum system is available upon request at the extra cost.

Anti-corrosive Pressure Gauge

3.8x10-5 to 1125 Torr measurement range

Anti-corrosive, gas-type independent 

High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

Fast atmospheric detection eliminates waiting time and shortens process cycle

Easy to exchange plug & play sensor element

Temperature Controller

30 programmable segments for precise control of heating rate, cooling rate and dwell time.

Built in PID Auto-Tune function with overheating & broken thermocouple protection.

Over temperature protection and alarm allows for operation without attendant(s).

+/- 1 ºC temperature accuracy.

RS485 Communications Port.   

Control Panel

7" touch screen control panel in built which will control temperature, gas flow rate, plasma power 

Overall dimensions

2400 L x 600 W x 1250 H mm

R2R Vacuum Chambers

Two vacuum sealed chambers are located in two ends of furnace and connected with quartz tube

The reeling rollers for substrate in and out are located in side vacuum chamber 

Reeling speed for the substrate is adjustable from 1-400mm/min

Max. movable substrate width L 65 mm for 80mm OD tube

One roll of copper foil with 65 mm width and 0.025 mm thick  ( ~5 kg) is included for customer practice.

100mm OD tube is available upon request , which can feeding substrate with max. width 80 mm


One year limited warranty with lift time support 


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