Splitable three zones tubular CVD furnace for high-temperature sintering

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$13,500.00 - $17,800.00 / Set | 1 Set/Sets (Min. Order)
Lead Time:
Quantity(Sets) 1 - 1 >1
Est. Time(days) 45 Negotiable
Customized logo (Min. Order: 1 Sets)
Customized packaging (Min. Order: 1 Sets)


Graphic customization (Min. Order: 1 Sets) Less
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Quick Details
Laboratory Heating Equipments
Brand Name:
Model Number:
CY- O1200-50IIIT-3Z-LV
Place of Origin:
Henan, China
Laboratory Heating Test Equipment
Max temperature:
Working temperature:
Power supply:
AC:220V 50/60Hz
Tube material:
High purity alumina
Display mode:
Sealing method:
stainless steel vacuum flange
vacuum CVD tube furnace
Gas mass flow meter:
Supply Ability
Supply Ability:
210 Set/Sets per Month
Packaging & Delivery
Packaging Details
plastic paper inside,polyfoam filled,wooden box outside
Picture Example:
Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 45 To be negotiated

Splitable three zones tubular CVD furnace for high-temperature sintering

Product Description

This equipment consists of a three-heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

Technical Parameters:

Vacuum tube furnace


CY- O1200-50IIIT-3Z-LV

Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm, 80mm, 100mm)

Tube length


Furnace chamber length


Heating zone length


Operating temperature


Temperature control accuracy


Temperature control mode

30 or 50 segment program temperature control

Display mode


Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" cutting sleeve joint, KF16/25/40 joint



Power supply

AC:220V 50/60Hz

Gas supply system



Gas channel


Measuring unit

Gas mass flow meter

Measuring range

A channel: 0~100SCCM H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.

B channel: 0~300SCCM N2 gas

C channel: 0~500SCCM Ar gas

measurement accuracy


Pipe pressure resistance


Working pressure difference


Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" cutting sleeve joint for gas inlet and outlet

Power supply

AC:220V 50/60Hz

Exhaust system

Mechanical pump


Pumping rate


Exhaust interface


Vacuum measurement

Pirani gauge

Ultimate vacuum


Power supply

AC:220V 50/60Hz

Pumping interface



The three-channel mass flow meter equipped with the system has high precision and high reliability, and can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

online service

Company Introduction

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.




Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.


Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.


Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.


Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.


Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.


Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.


More questions, please contact customer service

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