RF plasma enhanced chemical vapor deposition machine for sulfide preparation

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$16,800.00 - $36,500.00 / Set | 1 Set/Sets (Min. Order)
Lead Time:
Quantity(Sets) 1 - 1 >1
Est. Time(days) 58 Negotiable
Customization:
Customized logo (Min. Order: 1 Sets)
Customized packaging (Min. Order: 1 Sets)

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Overview
Quick Details
Classification:
Laboratory Heating Equipments
Brand Name:
CYKY
Model Number:
CY-PECVD-T01
Place of Origin:
Henan, China
Product name:
PECVD system
Max temperature:
1200℃
Working temperature:
1100℃(Continuous)
tube material:
high purity quartz
Certificate:
CE
RF Power range:
0~500W adjustable
Display mode:
LCD
Vacuum:
4.4E-3Pa
cooling method:
Forced air cooling
Mass flowmeter:
Four-channel mass flowmeter
Supply Ability
Supply Ability:
100 Set/Sets per Month
Packaging & Delivery
Packaging Details
wooden case
Port
China port
Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 58 To be negotiated

RF plasma enhanced chemical vapor deposition machine for sulfide preparation

Product Description

Description of the PECVD Tube Furnace:

Plasma enhanced CVD system consists of a plasma generator, a three-heating zone tube furnace, a single-heating zone tube furnace, an RF power supply, and a vacuum system.
In order for the chemical reaction to take place at a lower temperature, the activity of the plasma is utilized to promote the reaction, and thus the CVD is called plasma enhanced chemical vapor deposition (PECVD). The PECVD graphene film preparation device ionizes a gas containing a film constituent atom by means of a RF output of 13.56 Mhz, forms a plasma in a vacuum chamber, utilizes strong chemical activity of the plasma, improves reaction conditions, and utilizes plasma activity to promote the reaction, then deposits a desired film on the substrate.

Specification data of the PECVD tube furnace:

Three-heating zone tube furnace

Model

CY-O1200-50IIIT

Tube material

High purity quartz

Tube diameter

50mm

Tube length

2830mm

Furnace chamber length

660mm

Heating zone length

200mm+200mm+200mm

Operating temperature

0~1100℃

Temperature accuracy

±1℃

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

Single-heating zone tube furnace

Model

CY-O1200-50IT

Tube material

High purity quartz

Tube diameter

50mm

Tube length

2830mm

Furnace chamber length

440mm

Heating zone length

400mm

Constant   temperature zone

200mm

Operating   temperature

0~1100

Temperature control accuracy

±1

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

RF output system

Power range

0~500W adjustable

Working frequency

13.56MHz+0.005%

Working mode

Continuous output

Display mode

LCD

Matched impedance mode

Can match, the glow is evenly covered with three heating zone furnace tubes

Power stability

≤2W

Normal working reflected power

≤3W

Amplified reflected power

≤70W

Harmonic component

≤-50dBc

Machine efficiency

≥70%

Power Factor

≥90%

Supply voltage / frequency

Single-phase AC (187V~153V) Frequency 50/60Hz

Control mode

Internal control / PLC analog / RS232 / 485 communication

Power protection settings

DC overcurrent protection, power amplifier over temperature protection, reflected power protection

cooling method

Forced air cooling

Glow length

In the Ar, the RF power supply and the coil are combined to glow and the glow can fill the length of the furnace in three heating zones.

Gas supply system

Four-channel mass flowmeter

Mass flowmeter

Flow range

MFC1 range: 0~200sccm 

MFC2 range:   0~200sccm

MFC3 range: 0~500sccm 

MFC4 range: 0~500sccm

Corresponding to gases H2, CH4, N2, Ar,

measurement accuracy

±1.5%F.S

Repeatability

±0.2%FS

Linear precision

±1%F.S.

Response time

≤4s

Work pressure

-0.15Mpa~0.15Mpa

flow control

LCD touch screen control, digital display, each-channel gas contains a needle valve for individual control

Intake interface

Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube

Outlet interface

Can be connected to 1/4NPS or 6mm outer   diameter stainless steel tube

Connection method

Double ferrule connector

Operating temperature

5~45

Gas premix

Equipped with gas premixing device

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate

1.1L/S 

Exhaust interface

KF16

Vacuum measurement

Resistance gauge

Ultimate vacuum

1.0E-1Pa

Power supply

AC:220V 50/60Hz

Pumping interface

KF16

Rail

Rail length

2.5m~3m

It can realize the sliding of one furnace position length in the three-heating zone furnace to achieve rapid temperature rise and fall.

Reference picture of the PECVD tube furnace:

Other related PECVD tube furnace:

online service

Company Introduction

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

 

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.

Package

FAQ

 

Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.

 

Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.

 

Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.

 

Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.

 

Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.

 

Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.

 

More questions, please contact customer service