1200C Three Zones Sliding RTP Tube Furnace / RTP annealing tube furnace
CYKY-OTF-1200 is a three zone slide-able tube furnace with quartz tube and flanges and a max. temperature up to 1200°C. One pair of sliding rail is installed on bottom of furnace to allow sliding the furnace from one side to another to achieve max. heating and cooling rates up to 100°C/min. For fastest heating, the furnace may be pre-heated to a desired temperature and then be slided to the sample's position. As for fastest cooling, the furnace can be slided to another side after sample heating is completed. Moreover, the heating and cooling rates may reach 15°C/s under vacuum or inert gases. This furnace provides an alternative for rapid thermal processing at the lowest cost.
Specification of the three zone sliding RTP tube furnace:
Double layer steel structure with dual air cooling fans
One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side
Slding rail length is about 1200mm, the furnace can slide 600 mm distance
AC 208-240V Single Phase, 50/60 Hz
1200°C (<1 hour)
Heating Zone Length
300 mm for each zone and 900 mm in total
Constant Temperature Zone
600 mm (+/-1°C @ 400-1200°C)
Processing Tube Size
High purity fused quartz tube
Size: OD: 3.2" x ID: 3.0" x Length: 55" (inch) or OD: 80 x ID 75 x Length 2400 ( mm)
Two foam ceramic blocks are included which must be placed inside tube to avoid heat radiation damaging O-ring
Three temperature controller with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
Built-in over temperature alarm and protection allows for operation without attendant.
Three K type thermal couples are included.
+/ - 1°C
Stainless steel vacuum flanges are installed on both ends of tube with heavy duty support.
Limited by pump
10E-5 torr can be reached by molecular pump
10E-2 torr by mechanical pump.
Sliding Rails / Table
Double sliding rail made by Cr plated steel
Sliding length: 1200 mm
2500 L, × 510 H ×750W, mm
~ 150 Kg
Shipping Package Size
70" x 45" x 45" (inch)
Picture of the three zone sliding tube furnace:
normal two zone tube furnace
two zone sliding RTP tube furnace:
single zone sliding RTP tube furnace
Zhengzhou CY Scientific Instrument Co., Ltd.- is a high and new technology enterprise registered in Zhengzhou,Henan province. Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in researching and developing, designing and manufacturing of equipment used in scientific researches. Our mainly products include high temperature furnace and heating element, like lab muffle furnace, tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.