Vacuum crucible heat treatment chamber furnace for calcining or annealing semiconductor wafers (up to 6")

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$3,500.00 - $5,500.00 / Set | 1 Set/Sets (Min. Order)
Lead Time:
Quantity(Sets) 1 - 1 >1
Est. Time(days) 30 Negotiable
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Overview
Quick Details
Classification:
Laboratory Heating Equipments
Brand Name:
CYKY
Model Number:
CY-1200X-H8
Place of Origin:
Henan, China
Product name:
Crucible Vacuum Melting Furnace
Name:
melting furnace for Titanium
Power:
3 KW max.
Voltage:
Single phase 208 - 240 VAC / 50/60Hz
Working Temperature:
<= 1000 °C continuously
Heating Rate:
Max. 20°C/ min Recommended. 10°C/ min
Overall Dimensions:
700mm(L) x 440mm(W) x 435mm(H)
Net Weight:
80 kg
Shipping Weight:
200 lbs
Compliance:
CE Certified
Supply Ability
Supply Ability:
399 Set/Sets per Month Vacuum Chamber Furnace
Packaging & Delivery
Packaging Details
Plastic paper inside, Polyfoam filled, Wooden box outside
Port
Any port of china
Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 30 To be negotiated

Vacuum crucible heat treatment chamber furnace for calcining or annealing semiconductor wafers (up to 6") -CY-1200X-H8

Product Description

 

CY-1200X-H8 is a vacuum furnace. It equips a 7.5" ID x 13.4"L Quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 Torr through a mechanical or molecular vacuum pump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. It also can also be used as vacuum brazing furnace for fusing small parts.


SPECIFICATIONS

Power

3 KW max. 

 

Voltage

Single phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)


 


Working Temperature

  • <= 1000 °C continuously
  • Max. 1100 °C, < 30 minutes
  • Temperature Uniformity: +/- 2°C

 

Heating Rate

  • Max. 20°C/ min
  • Recommended. 10°C/ min

 

Heating Elements    

High-quality Ni-Cr-Al resistance wire as heating elements and can be heated up to 1200°C.

 

Quartz Tube Size & Effective Heating Area      

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L. 
  • Heating area: 7.5" ID x 8.5" Depth (7.6Liter)
  • Uniform Temperature zone:  4"Dia x 3.5" depth in center position within +/- 5ºC
  • Quartz tube is replaceable  ( click picture left to order spare tube )

 


Vacuum Flange 
(with dual 1/4" feedthrough ports)


.


  • Stainless steel vacuum flange with dual high-temperature silicone O-rings at the front door.
    • One 1/4 gas inlet which allows continuous gas delivery during operation. A gas quartz tube (6.35mm O.D) is provided to reach the location of the sample and deliver reactive gas to sample directly. (Fig A, B)
    • One 1/4 thermocouple feedthrough port allows a 1/4 O.D thermocouple probe to be inserted into the chamber and measure temperature of the sample independently. (Fig. C) (Thermocouple is optional). Four probes electric resistance measurement feedthrough also is available upon request.
    • M15 x 1.5mm Thread for both 1/4" feedthrough
    • One bored Al2O3 foam refractory block (190Dia *  50mm) is provided.

               
           

 

Gas Inlet and Outlet

  • One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace.
  • The inert gas can be introduced into the chamber via the inlet for purging purpose. 
  • If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.


(Attention: MTI does not recommend using its products under hazardous conditions. We will not be liable for any damages incurred under hazardous conditions. Tube furnaces with quartz tubes are designed for use under vacuum condition and at low-pressure levels <  0.2 bars  ( 3 PSI ).)

 

Water Cooling

A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 300°C. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (water chiller is sold separately). 

 



Vacuum Pressure




  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials etc. By using KFD25, stainless steel pipe, MTI's two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10 mtorr (10-2 torr)via mechanical pump within 30 minutes withoutThermal Block
    • 60 mtor(6x10-2  oTorr ) via mechanical pump within 30 minutes with the Quartz Thermal Block at 900C                     

 

Overall Dimensions

700mm(L) x 440mm(W) x 435mm(H)          

Net Weight

80 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x28"(W) x35"(H) 


Warranty

  • One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty).  


Compliance

  • CE Certified

 

Pictures

 

Company Information

Company Description:

Zhengzhou CY Scientific Instrument Co., Ltd is a professional high- tech enterprise,it has 20 years history of R&D,manufacture and sales in advanced materials.Many products are awarded as high-tech products and obtain patents.

 

Mainly products:

Muffle furnace

Atmosphere furnace

Tube furnace

Dental sintering furnace

Vacuum furnace

Crucible furnace

Bottom loading furnace

Car bottom furnace

Etc.

 

        

 

 

Packaging & Shipping

 

 

Packaging:
-The glass parts will be wrapped with foam,then put into the carton; the mainbody portion will be packed in wooden cases;
-Both neutral and customized packaging can be available.
Shipping:
-We can ship the goods to you by International Express such as DHL,UPS,TNT,EMS and so on, you can also choose the appropriate one based on your timeline and budget. Besides,you can choose to use your own shipping agent.

 

Shipping methodNote
ExpressDoor to door, very convenient, don't need to clearance or pick-up
By air

Airport to airport, you need to do the customs clearance and pick up  the

goods at your local airport, which you can have a local shipping agent to do for you.

By seaPort to port and you need to do the customs clearance and pick-up the goods

at your local port, which you can have a local shipping agent to do for you.

 

 

Contact Information

 Pamela