500 Set/Sets per Month Split Type Max Dual Sliding Rtp Tube Furnace for Molybdenum Disu
Packaging & Delivery
2 weeks after receiving the payment
Split Type Max Dual Sliding Rtp Tube Furnace for Molybdenum Disulfide (MOS2) Research
Description of MoS2 Tube furnace:
This set of equipment is split vacuum tube furnace and the front end is equipped with pre-heater heated to 400 ºC, the auxiliary sulfur powder evaporation, the rear end of the dual-zone curing oven, precise temperature control, easy to operate. .The left side is equipped with a flange support,preheater and sulphur furnace can be used separately.Right side is equipped with atmosphere micro-adjustment device,which can accurately reflect the gas pressure in the chamber.The regulating valve with a scale,used for low pressure CVD, is very practical and good repeatability.
Double layer steel casing with air cooling High purity
alumina fiber insulation for max. energy saving Splitable
cover for easy tube replacement
AC 208-240V Single Phase, 50 or 60 Hz
Maximum Heating Rate
<= 20 C /min
Heating Zone Length
Three zones: (880mm, 35" in total) Zone 1: 220mm (8.6" ) Zone 2: 440mm (17.3") Zone 3: 220 mm (8.6")
Constant Temperature Zone
If three zones are set at the same temperature, constant
temperature zone is 25" (625 mm) long with a temperature
discrepancy of +/- ℃. If using only one zone (center zone), constant temperature
zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1℃.
Fe-Cr-Al Alloy doped by Mo
Three precision temperature controllers to control three
zonesseparately. PID automatic control with 30 programmable segments for
precise control of heating rate, cooling rate and dwell time. Built in overheating & broken thermocouple protection. Over temperature protection and alarm allows for
operation without attendant(s).+/- 1 C temperature
accuracy.RS485 Communications Port..
Quartz Tube& Sealing
80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube
included. Vacuum flanges with valves and pressure gauge
are included. Thermal block must be placed inside tube
Two stainless steel flanges with both vacuum gauge and
valves included. Min. vacuum pressure achieved by mechanical pump is
5.5 m-torr.( 5.5x10^-3 torr). The pressure can reach 10^-5 torr by using mechanical +
molecular pump. Leaking rate is < 5 m-torr / min. and stable vacuum
pressure after 24 hours is < 2 torr.
An Oxygen Sensor can be used to monitor the oxygen
level of gas(es) used in CVD systemsfor preventing or
120 L/m Rotary Vane Vacuum Pump is included with max.
vacuum pressureof 10^-2torr. Stainless steel hose tube is
included for connectingto tube furnace.
Three gas flow-meters (4% accuracy FS) are installed
inside the mobile case to enable monitoring of gas flowing
rates Compact direct read flow meter, 10-100 cc/min. Compact direct read flow meter, 16-160 cc/min. Compact direct read flow meter, 25-250 cc/min.
Four stainless steel valves are installed in the side panel of
mobile cart to control mixing of three inlet gases separately
Furnace: 1100 X 450 x 670 mm Bottom Mobile case: 600x600x597 mm