Split Type Max Dual Sliding Rtp Tube Furnace for Molybdenum Disulfide (MOS2) Research

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$3,380.00 - $4,690.00 / Set
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Overview
Quick Details
Place of Origin:
Henan, China
Brand Name:
CYKY
Model Number:
CY-1200-80IIIC
Maximum Temperature:
1200 C
Continuous Temperature:
1100C
Power Consumption:
5 KW
Input Voltage:
AC 208-240V Single Phase, 50 or 60 Hz
Heating Elements:
Fe-Cr-Al Alloy doped by Mo
Supply Ability
Supply Ability:
500 Set/Sets per Month Split Type Max Dual Sliding Rtp Tube Furnace for Molybdenum Disu
Packaging & Delivery
Packaging Details
wooden case
Port
Shanghai/Qingdao
Lead Time :
2 weeks after receiving the payment

Split Type Max Dual Sliding Rtp Tube Furnace for Molybdenum Disulfide (MOS2) Research

Description of MoS2 Tube furnace:

This set of equipment is split vacuum tube furnace and the front end is equipped with pre-heater heated to 400 ºC, the auxiliary sulfur powder   evaporation, the rear end of the dual-zone curing oven, precise  temperature control, easy to operate. .The left side is equipped with a  flange support,preheater and sulphur furnace can be used separately.   Right side is equipped with atmosphere micro-adjustment device,which  can accurately reflect the gas pressure in the chamber.The regulating   valve with a scale,used for low pressure CVD, is very practical and    good repeatability.

Technical Parameters:

 

Furnace 
Construction

Double layer steel casing with air cooling High purity 

alumina fiber insulation for max. energy saving Splitable 

cover for easy tube replacement 

Power 
Consumption

5 KW

Input Voltage 

AC 208-240V Single Phase, 50 or 60 Hz 

Maximum 
Temperature 

1200 C 

Continuous 
Temperature 

1100 C 

Maximum 
Heating Rate 

<= 20 C /min 

Heating Zone 
Length

Three zones: (880mm, 35" in total)
Zone 1: 220mm (8.6" )
Zone 2: 440mm (17.3")
Zone 3: 220 mm (8.6")

Constant 
Temperature 
Zone

If three zones are set at the same temperature, constant 

temperature zone is 25" (625 mm) long with a temperature

discrepancy of +/- .
If using only one zone (center zone), constant temperature

zone is 4.3" (110 mm) long with a temperature discrepancy of +/- 1.

Temperature 
Accuracy

+/- 1

Heating 
Elements

Fe-Cr-Al Alloy doped by Mo

Temperature 
Controller

Three precision temperature controllers to control three 

zonesseparately.
PID automatic control with 30 programmable segments for 

precise control of heating rate, cooling rate and dwell time.
Built in overheating & broken thermocouple protection.
Over temperature protection and alarm allows for 

operation without attendant(s).+/- 1 C temperature 

accuracy.RS485 Communications Port..

Quartz Tube& 
Sealing

Flanges

80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube

 included. Vacuum flanges with valves and pressure gauge

are included. Thermal block must be placed inside tube 

Vacuum 

Sealing 
Flanges

Two stainless steel flanges with both vacuum gauge and 

valves included.
Min. vacuum pressure achieved by mechanical pump is 

5.5 m-torr.( 5.5x10^-3 torr). 
The pressure can reach 10^-5 torr by using mechanical +

molecular pump.
Leaking rate is < 5 m-torr / min. and stable vacuum 

pressure after 24 hours is < 2 torr.

Oxygen 

Monitoring

An Oxygen Sensor can be used to monitor the oxygen 

level of gas(es) used in CVD systems for preventing or

 reducing oxidation.

Vacuum Pump

120 L/m Rotary Vane Vacuum Pump is included with max. 

vacuum pressure of 10^-2torr. Stainless steel hose tube is

 included for connecting to tube furnace.

Gas Flow 

Meter and Pressure Meter

Three gas flow-meters (4% accuracy FS) are installed 

inside the mobile case to enable monitoring of gas flowing 

rates 
Compact direct read flow meter, 10-100 cc/min.
Compact direct read flow meter, 16-160 cc/min.
Compact direct read flow meter, 25-250 cc/min.

Valves

Four stainless steel valves are installed in the side panel of

mobile cart to control mixing of three inlet gases separately

Dimensions

Furnace: 1100 X 450 x 670 mm
Bottom Mobile case: 600x600x597 mm

 

More Pictures for reference:

tube furnace0007.jpg

tube furnace 0008.jpg

Contact Information:

Email: cy-jenny at cysi.wang

Tel: +86 371 55199322

Fax: +86 371 86036875

Contact Person: Eric