The Thin Film Thickness/Rate Deposition Monitor is based on the principle that the oscillating frequency of a quartz crystal is changed by the mass of a deposited film on its upper face. Electronically measuring this effect allows to determine the thickness of a deposited film. Once the density of the evaporated material is entered into the system, the thickness is measured to a resolution of 0.037 Å. The crystal and holder are mounted in the vacuum chamber and connected to the Monitor via the supplied vacuum feedthrough.
Technical parameters of Deposition Rate Monitor
Thin Film Thickness Tester
+/- 0.03Hz (5-6MHz), 0.0136Ã
Standard sensor crystal
8 bit resolution, PWM
Picture of Deposition Rate Monitor
Widely used in
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