CY-16-3HD-LD is a CE certified compact three rotary target plasma sputtering coater with a touch screen digital controller, and a substrate heater capable of heating up to 500 °C. It can coat 1- 3 types of metallic materials to sample with the diameter up to 50 mm. Three sputtering targets: gold, silver, copper are included for immediate use.
Single phase 220 VAC, 50 / 60Hz
700 W (including vacuum pump)
For using 110 VAC, we will include a transformer for you.
1600 VDC40 mA max
Vacuum chamber: 150 mm ID x 150 mm H, made of high purity quartz
Sealing flange made of stainless steel with flat O-ring
Sample Stage with Heater
Stage size: 50 mm Dia.
Sputtering distance range: 25 – 40 mm adjustable
Rotatable stage with three sputtering positions (controlled by the touch screen)
Substrate heater is built-in with a maximum heating temperature of 500 °C
PID temperature controller with +/- 1 °C accuracy is integrated into the touch screen
6” color touch screen with PLC integration for easy operation
Vacuum gauge, sputtering current meter, and substrate temperature control are integrated to the touch screen panel
Adjustment knobs on the front panel for gas intake and sputtering current control
Sputtering position, sputtering timer, and process logging are accessible from the touch screen
Stainless steel shield cage is included for extra protection
Target size requirements: 47 mm Dia. x 2.5 mm max
Three targets are included in the standard package for immediate use:
Au target, 47 mm Dia. x 0.12 mm
Ag target, 47 mm Dia. x 0.5 mm
Cu target, 47 mm Dia. x 2.5 mm
Vacuum Pump (Optional)
Built-in KF25 vacuum port for connecting to a vacuum pump
Vacuum pump with KF25 connector is required, but not included.
A double stage mechanical vacuum pump for vacuum up to 1.0E-2 Torr Or a turbo pump for vacuum up to 1.0E-5 Torr
Vacuum pump can be plugged into the power outlet on the left of coater for automatic control
440 mm L × 330 mm W × 455 mm H
One year limited with lifetime support
Packaging & Shipping
Packaging of Magnetron Plasma Sputtering Coater machine
Shipping and transportation
As customer request. Generally, Our mode of transport are as by sea, by air or rail transport
T/T, L/C, WEST UNION, PAYPAL, ESCROW AND ETC
Main product is 15 month, except wearing parts.
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.