VBF-1200X-H8 is a UL/CSA certificateable vacuum furnace. It equips a 7.5" ID x 13.4"L quartz tube chamber sitting horizontally. Water-cooled stainless steel vacuum flanges with valves are installed to achieve a vacuum of 10-2 to10-5 torr through a mechanical or molecular vacuum pump. It is designed for calcining or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100C. It also can also be used as vacuum brazing furnace for fusing small parts.
Technical parameters of vacuum crucible furnace:
4 KW max.
Single phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
<= 1000 °C continuously
Max. 1100 °C, < 30 minutes
Temperature Uniformity: +/- 2C
Max. 20C/ min
Recommended. 10°C/ min
High quality Ni-Cr-Al resistance wire as heating elements and can be heated up to 1200C.
Quartz Tube Size & Effective
Tube size: 8" O.D. x 7.5" I.D x 13.4" L.
Heating area: 7.5" ID x 8.5" Depth (7.6Liter)
Uniform Temperature zone: 4"dia x 3.5" depth in center position within +/- 5ºC
Quartz tube is replaceable ( click picture left to order spare tube )
Stainless steel vacuum flange with dual high temperature silicone O-rings at front door.
One needle valve is built into the flange for use as gas inlet.
One KF25D port on left side of furnace for connection to vacuum pump.
A water cooling jacket has been built inside the flange to protect the vacuum sealing
assembly from melting at over 300°C. The inlet and outlet ports located on the left side of furnace
are used for connecting to a water chiller through two 12 mm dia. polyurethane tubes
(water chiller is sold separately). Please click picture below left to order the water chiller.
A Quartz Thermal Block (filled with fibrous alumina) is included to prevent heat radiation and dissipation.
It also provides excellent vacuuming while ensuring a clean environment inside the chamber.
Optional: If using the furnace for flat samples, a flat sample holder (pictured left-bottom)
Digital Vacuum Gauge
Mechanical vacuum gauge with range between -0.1 to 0.15 Mpa is included for vacuum pressure measurement. You may order a gas independent vacuum gauge with wide range between 3.8x10-5 to 1125 Torr at picture below
KF25 Vacuum Fitting with KF25 Right-Angle Valve for quick connection to KF25 Bellows.
Mechanical vacuum gauge Optional gas independent gauge
Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials etc.
By using KFD25, stainless steel pipe, two stage mechanical pump and KF25 Ball valve, the furnace can achieve vacuum levels below:
10 mtorr (10-2 torr)via mechanical pump within 30 minutes without Thermal Block
60 mtor(6x10-2 torr ) via mechanical pump within 30 minutes with the Quartz Thermal Block at 900C
Vacuum pump and pipe are not included, please click on BOLD or picture on optional part below to order.
For achieving a higher vacuum level, a Turbo-molecular Vacuum Pump Station is necessary. (click bottom left picture to see detail specs )
Spare sealing O-ring is available at extra cost ( click bottom right picture below )
Quartz tube of vacuum crucible furnace
Vacuum flange of vacuum crucible furnace
Detailed photos of vacuum crucible furnace
Other types of vacuum crucible furnace
Packaging & Shipping
1.One year free warranty.
2.All machines are debugged before shipment.
3.Lifetime technical support and service.
4.24 hours on line or phone or by email technical support.
5.We offer detailed machine manual and software manual.
6.Our factory make a vivid training CD.
7.Life-long free maintenance.
8.Free training in our factory.
Welcome to visit our factory, learn machine face to face.
24-hours online service makes your inquiry be reply immediately.
Zhengzhou CY Scientific Instrument Co.,Ltd locate in hi-tech zone, Zhengzhou city.It is a high-tech companies that engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches.Mainly focus onOur main products include:microwave sintering furnace, dental porcelain furnace, tube furnace,muffle furnace,,zirconia sintering furnace,Phosphor powder sintering furnace,crystal sintering furnace, battery material sintering furnace, CVD system, relative accessories and etc. determined to do advanced materials preparation equipment manufacturers and suppliers of leader.