Benchtop plasma treatment machine for nanoscale surface cleaning and activation of small samples

FOB Reference Price:Get Latest Price
$4,800.00 - $13,800.00 / Set | 1.0 Set/Sets (Min. Order)
Model Number:
Critical Cleaning / Residue Free
Industry Used:
Electronic Industry Optics
Lead Time:
Quantity(Sets) 1 - 1 >1
Est. Time(days) 30 Negotiable
Report Suspicious Activity
Quick Details
Machine Type:
Applicable Industries:
Manufacturing Plant, laboratory
After Warranty Service:
Online support
Local Service Location:
United States
Showroom Location:
United States
Place of Origin:
Henan, China
Brand Name:
Container / Bottle Cleaning
Cleaning Process:
plasma cleaning, Plasma Cleaning
Cleaning Type:
plasma clean
Glass / Ceramic, Glass,Cellphone Screen, semiconductor,Pe,Pvc
After-sales Service Provided:
Online support
Product name:
Lab 13.56Mhz 10L Plasma Cleaner
Precision Cleaning of Semiconductors and Microelectronics
Power Supply:
AC220V 50/60Hz
Lab plasma cleaning equipment
Operating temperature:
Supply Ability
Supply Ability:
200 Set/Sets per Month
Packaging & Delivery
Packaging Details
Plastic paper inside, polyfoam filled, wooden box outside or as your requirement.
Zhengzhou, Shanghai etc.
Picture Example:
Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 30 To be negotiated

Benchtop plasma treatment machine for nanoscale surface cleaning and activation of small samples

Product Description

10L plasma cleaner is a compact, non-destructive cleaning device. The plasma cleaner uses low air pressure to excite plasma as a cleaning medium, thereby effectively avoiding secondary pollution caused by the liquid cleaning medium to the object to be cleaned. The device is equipped with a mechanical vacuum pump, while vacuuming maintains the vacuum of the chamber, the pollutants after the plasma reaction can also be pumped away by the vacuum pump; therefore, the short-time cleaning can completely clean the organic pollutants.

In addition to the cleaning function, this small plasma cleaner can change the surface properties of some materials according to the needs under certain conditions. During the cleaning process, the glow discharge of the small plasma cleaner not only enhances the adhesion, compatibility and wettability of these materials, but also disinfects and sterilizes the materials.

Available in 2L/5L/10L quartz cleaning chambers, this plasma cleaner is suitable for laboratory and small-scale production. Using 13.56Mhz rf power supply, can be used to match a variety of commonly used gas plasma. There are a variety of common specifications for RF power supply from 100W to 1000W, which can meet the diverse needs of users.


Technical parameters:

Main parts



Cleaning the chamber

Chamber material

High purity quartz

Chamber size

Diameter 200 mm; Length 340 mm

RF power supply

Power supply features

The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.

Power advantage

 Long time normal operation

 Simple and flexible operation

 High power supply efficiency and low heat generation

With perfect reflection power protection function

RF power

0~300W continuously adjustable

Signal frequency

13.56MHz ±0.005%

Reflected power


Power stability


RF connector

N type connector

Machine efficiency


Harmonic component

-50 dBc

cooling method

Forced air cooling

Gas measurement

Measuring unit

Float flowmeter

Gas channel

Two channels

A channel range


B channel range



Vacuum measurement

Digital vacuum gauge (resistance gauge)

Vacuum pump

Two-stage rotary vane vacuum pump

Motor speed

50 Hz: 1440; 60 Hz: 1720

Pumping rate

50 Hz: 1.1L/s; 60 Hz: 1.3L/s

Vacuum range


Ultimate vacuum


Motor noise


Pipe interface

Gas inlet: KF16; exhaust port KF16.

Connecting pipe

KF16 vacuum bellows

Vacuum valve

Solenoid valve

Motor Power



Power supply

AC220V 50/60Hz

Total power


Operating temperature

-10- 40

Working vacuum


Overall size


Total Weight

80kg (including packaging)


Plasma cleaning can remove nanoscale contamination and alter surface chemistry properties without affecting the performance of bulk materials. Plasma cleaning is performed at near ambient temperatures to minimize the risk of damage to the heat sensitive material. According to the use of process gases and process conditions, plasma cleaning can be used for cleaning, activation, sterilization and surface modification. It can be applied to a wide range of materials as well as complex surface geometries and a variety of applications, including materials science, polymers science, biomedical materials, microfluidics, optics, microscopy, dentistry, medical research, precision components including semiconductors, crystals, resistors, capacitors, PCB, IC chips, connectors, silicon wafers, transistors, electronic circuit boards, computer motherboards, piezoelectric ceramic substrates, image tube and other electronic devices  cleaning during production and processing process.


Metal: remove oil, greasy dirt and other organic matter and oxide layer on the metal surface;

Automotive manufacturing: used for pre-treatment of plastics and paint spraying in automotive manufacturing processes;

Textile production: used for the hydrophilicity, hydrophobicity and surface modification of textiles, filter screens and films;

Biomedicine: Petri dishes enhance activity, vascular stents, syringes, catheters and pro-wetting of various materials, before cross-coating treatment;

Aerospace: surface coating pretreatment of insulating materials, electronic components, etc.;

Electronics: circuit board cleaning and etching. Non-oxidation and activation treatment of PP and other materials, to improve solderability;

Semiconductor industry: wafer processing and processing to remove photoresist, pre-package pretreatment;

LED: Pre-treatment before the bracket is cleaned and packaged;


online service

Company Introduction


Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.

We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.




Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.


Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.


Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.


Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.


Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.


Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.


More questions, please contact customer service

Contact Us