Roll to Roll Plasma Enhanced CVD tube furnace for two-dimension films growth

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  • 1 - 1 Sets
  • >=2 Sets
Lead Time:
Quantity(Sets) 1 - 1 >1
Est. Time(days) 35 Negotiable
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Quick Details
Laboratory Heating Equipments
Brand Name:
Model Number:
Place of Origin:
Henan, China
max. temperature:
temperature accuracy:
Max power:
Tube material:
High purity quartz
Tube size:
80mm I.D x 1400mm L
Sealing mode:
Stainless steel vacuum flange
Vacuum measurement:
Resistance gauge
two dimensional film growth system
RF power:
one year
Supply Ability
Supply Ability:
110 Set/Sets per Month Roll to Roll PE-CVD System
Packaging & Delivery
Packaging Details
Plastic paper inside,polyfoam filled,wooden box outside
Picture Example:
Lead Time :
Quantity(Sets) 1 - 1 >1
Est. Time(days) 35 To be negotiated

Roll to Roll Plasma Enhanced CVD tube furnace for two-dimension films growth

Product Description

The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.
The equipment is composed of five parts: a roll-to-roll movement system, 1200℃2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-channel mass flowmeter gas mixer system. The whole machine can work in the vacuum / atmosphere protection environment.
The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment.

Technical parameters of roll to roll PECVD furnace:

1200℃ Two-heating-zone tube furnace



Max power


Heating zone

Dual zones 200mm+200mm

Working temperature


Temperature accuracy


Temperature control method

AI-PID 30-stage process curve, can store multiple

Tube material

High purity quartz

Tube size

φ80mm I.D x 1400mm L

Sealing mode

Stainless steel vacuum flange

Vacuum measurement

Resistance gauge

Working gas

Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen

Vacuum pump

Bipolar rotary vane vacuum pump

Ultimate vacuum


Three-channel mass flowmeter

Valve type

Stainless steel needle valve

Gas channels


Pressure range



0~100 SCCM (Ar)

0~200 SCCM(H2)

0~500 SCCM(CH4)

Flow control range


Mixing tank volume


Gas path material

304 stainless steel

Pipe interface

6.35mm Bite type joint

Power supply

AC220V 50Hz

RF power

Output Power


Output accuracy


RF frequency


RF stability


Cooling method

Water cooling

Other PECVD system:

online service

Company Introduction

Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.


We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.




Q. Are you a manufacturer or a trading company?

A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.


Q. How is your company's product after-sales service system?

A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.


Q. How long is your delivery time? If I want to customize the instrument, how long does it take?

A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.


Q. Our country's power supply and plug are different. How do you solve it?

A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.


Q. How to pay?

A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.


Q. How is the package of goods? Delivery methods?

A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.


More questions, please contact customer service